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TEMlab Electron Beam and Thermal Evaporator
Plasmatherm 1
Plasmatherm 2
E-beam Evaporator, Denton Integrity 20 Coating System
Thermal Evaporator
Sputterer - Denton Explorer 14
STS Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE), STS Multiplex ASE
Trion Inductively Coupled Plasma Etcher
Reactive Ion Etcher (RIE) -- Anelva RIE DEM-451
Bruce Furnace
Aligner 1
Aligner 2
HF
Branson/PE II
Rapid Thermal Annealer
Dicing Saw Disco DAD 320
Wire Bonder
LabLine Equipment Clean Oven 01
Heidelberg DWL 66FS Mask Writer
Zeta-20 3-D Profilometer
Vacuum Bake Oven
All
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TEMlab Electron Beam and Thermal Evaporator
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Isadora
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Plasmatherm 1
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Plasmatherm 2
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E-beam Evaporator, Denton Integrity 20 Coating System
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Thermal Evaporator
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Sputterer - Denton Explorer 14
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STS Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE), STS Multiplex ASE
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Trion Inductively Coupled Plasma Etcher
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Reactive Ion Etcher (RIE) -- Anelva RIE DEM-451
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Bruce Furnace
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Jim
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Aligner 1
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Aligner 2
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HF
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Branson/PE II
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Rapid Thermal Annealer
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Dicing Saw Disco DAD 320
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Wire Bonder
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LabLine Equipment Clean Oven 01
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Heidelberg DWL 66FS Mask Writer
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Zeta-20 3-D Profilometer
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Vacuum Bake Oven
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