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TEMlab Electron Beam and Thermal Evaporator
Plasmatherm 1
Plasmatherm 2
E-beam Evaporator, Denton Integrity 20 Coating System
Thermal Evaporator
Sputterer - Denton Explorer 14
STS Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE), STS Multiplex ASE
Trion Inductively Coupled Plasma Etcher
Reactive Ion Etcher (RIE) -- Anelva RIE DEM-451
Bruce Furnace
Aligner 1
Aligner 2
HF
Branson/PE II
Rapid Thermal Annealer
Dicing Saw Disco DAD 320
Wire Bonder
LabLine Equipment Clean Oven 01
Heidelberg DWL 66FS Mask Writer
Zeta-20 3-D Profilometer
Vacuum Bake Oven
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HF
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